Field Emission Scanning Electron Microscope (FE-SEM)

Field Emission Scanning Electron Microscope (FE-SEM)

Zeiss AURIGA FE-SEM/FIB/EDX

This high resolution scanning electron microscope is combined with focused ion beam (FIB) and energy dispersive x-ray spectroscopy (EDX).

 Electron Optics

  • Schottky type field emission
  • High tension  100 V- 30 kV
  • Resolution 1.0 nm @ 15 kV, 1.9 nm @ 1 kV
  • Beam current upto 20 nA
  • Scan rotation, dynamic focus, tilt correction

Detectors

  • Everhart-Thornley SE detector
  • In-lens SE detector
  • Sample current monitor
  • Two chamber scopes with IR-illumination

 Stage

  • Eucentric stage
  • X,Y, Z,  tilt and rotation  coordinates
  • Anti-vibration isolation

FIB

  • Galium liquid metal ion source
  • High tension  1 kV-30 kV
  • Resolution 7.0 nm
  • Beam current 1 pA – 50 nA
  • Motorized Aperture alignment
  • Platinum gas co-deposition

Microanalysis

  • EDX profiling and imaging
  • LN2- free detector
SEM FIB

FE-SEM

Contact :  Anuchit Ruengwittayanon, anuchit@sut.ac.th, 044-223193

[Gallery][Instrument Data][Add. Info.]

Responses are currently closed, but you can trackback from your own site.

Comments are closed.


Hit Counter provided by
technology news