Field Emission Scanning Electron Microscope (FE-SEM)
Zeiss AURIGA FE-SEM/FIB/EDX
This high resolution scanning electron microscope is combined with focused ion beam (FIB) and energy dispersive x-ray spectroscopy (EDX).
Electron Optics
- Schottky type field emission
- High tension 100 V- 30 kV
- Resolution 1.0 nm @ 15 kV, 1.9 nm @ 1 kV
- Beam current upto 20 nA
- Scan rotation, dynamic focus, tilt correction
Detectors
- Everhart-Thornley SE detector
- In-lens SE detector
- Sample current monitor
- Two chamber scopes with IR-illumination
Stage
- Eucentric stage
- X,Y, Z, tilt and rotation coordinates
- Anti-vibration isolation
FIB
- Galium liquid metal ion source
- High tension 1 kV-30 kV
- Resolution 7.0 nm
- Beam current 1 pA – 50 nA
- Motorized Aperture alignment
- Platinum gas co-deposition
Microanalysis
- EDX profiling and imaging
- LN2- free detector
|
|
Contact : Anuchit Ruengwittayanon, anuchit@sut.ac.th, 044-223193
[Gallery][Instrument Data][Add. Info.]