Field Emission Scanning Electron Microscope (FE-SEM)

Field Emission Scanning Electron Microscope (FE-SEM)


This is an advanced high resolution scanning electron microscope coupled with wavelength dispersive x-ray spectroscopy (WDX) and  energy dispersive x-ray spectroscopy (EDX).

Electron Optics

  • Schottky type field emission
  • Super hybrid lens
  • High tension  100 V- 30 kV
  • Resolution 0.8 nm @ 15 kV, 1.2 nm @ 1 kV
  • Magnification 25x – 1,000,000x
  • Beam current upto 200 nA
  • Scan rotation, dynamic focus, tilt correction


  • Upper electron detector (UED)
  • Upper SE detector
  • Backscattered electron detector (BED)
  • Lower electron detector (LED)


  • 5-axis eucentric stage
  • X,Y, Z,  tilt and rotation  coordinates
  • X 70 mm ,Y 50 mm
  • Tilt  -5 to 70 degree
  • Anti-vibration isolation


  • WDX profiling and imaging
  • EDX profiling and imaging

Contact :  Anuchit Ruengwittayanon,, 044-223193

[Gallery][Instrument Data][Add. Info.]

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