Field Emission Scanning Electron Microscope (FE-SEM)
JEOL JSM 7800F
This is an advanced high resolution scanning electron microscope coupled with wavelength dispersive x-ray spectroscopy (WDX) and energy dispersive x-ray spectroscopy (EDX).
Electron Optics
- Schottky type field emission
- Super hybrid lens
- High tension 100 V- 30 kV
- Resolution 0.8 nm @ 15 kV, 1.2 nm @ 1 kV
- Magnification 25x – 1,000,000x
- Beam current upto 200 nA
- Scan rotation, dynamic focus, tilt correction
Detectors
- Upper electron detector (UED)
- Upper SE detector
- Backscattered electron detector (BED)
- Lower electron detector (LED)
Stage
- 5-axis eucentric stage
- X,Y, Z, tilt and rotation coordinates
- X 70 mm ,Y 50 mm
- Tilt -5 to 70 degree
- Anti-vibration isolation
Microanalysis
- WDX profiling and imaging
- EDX profiling and imaging
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Contact : Anuchit Ruengwittayanon, anuchit@sut.ac.th, 044-223193
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